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mpxh6300a rev 4, 01/2007 freescale semiconductor technical data ? freescale semiconductor, in c., 2007. all rights reserved. high temperature accuracy integrated silicon pressure sensor for measuring absolute pressure, on-chip signal conditioned, temperature compensated and calibrated the freescale mpxh6300a series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networ ks to provide a high output signal and temperature compensation. the small form factor and high reliability of on-chip integration make the freescale pressure sensor a logical and economical choice for the system designer. the mpxh6300a series piezoresistive transducer is a state-of-the-art, monolithic, signal conditio ned, silicon pressure sensor. this sensor combines advanced micromachining techniques, th in film metallization, and bipolar semiconductor processing to provide an accu rate, high level analog output signal that is proportional to applied pressure. figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. features ? improved accuracy at high temperature ? available in small and super small outline packages ? 1.5% maximum error over 0 to 85 c ? ideally suited for mi croprocessor or microcontroller-based systems ? temperature compensated from ?40 to +125 c ? durable thermoplastic ( pps) surface mount package application examples ? industrial controls ? engine control/manifold absolute pressure (map) ordering information device type options case no. mpx series order no. packing options device marking basic element absolute, element only 1317 mpxh63000a6u rails mpxh6300a absolute, element only 1317 mpxh6300a6t1 tape & reel mpxh6300a ported element absolute, axial port 1317a mpxh6300ac6u rails mpxh6300a absolute, axial port 1317a MPXH300AC6T1 tape & reel mpxh6300a mpxh6300a series integrated pressure sensor 20 to 304 kpa (3.0 to 42 psi) 0.3 to 4.9 v output mpxh6300a6u/6t1 case 1317-04 pin numbers (1) 1. pins 1, 5, 6, 7, and 8 are internal device connections. do not connect to external circuitry or ground. pin 1 is noted by the notch in the lead. 1 n/c 5 n/c 2 v s 6 n/c 3 gnd 7 n/c 4 v out 8 n/c super small outline packages mpxh6300ac6u/c6t1 case 1317a-03
sensors 2 freescale semiconductor mpxh6300a figure 1. fully integrated pressure sensor schematic table 1. maximum ratings (1) 1. exposure beyond the specified limits may c ause permanent damage or degradation to the device. rating symbol value unit maximum pressure (p1 > p2) p max 1200 kpa storage temperature t stg ?40 to +125 c operating temperature t a ?40 to +125 c output source current @ full scale output (2) 2. maximum output current is controlled by effective impedance from v out to gnd or v out to v s in the application circuit. i o +0.5madc output sink current @ minimum pressure offset 2 i o ? ?0.5 madc v s v out gnd sensing element pins 1, 5, 6, 7, and 8 are no connects for small outline package devices thin film temperature compensation and gain stage #1 gain stage #2 and ground reference shift circuitry
sensors freescale semiconductor 3 mpxh6300a table 2. operating characteristics (v s = 5.1 vdc, t a = 25c unless otherwise noted, p1 > p2.) characteristic symbol min typ max unit pressure range p op 20 ? 304 kpa supply voltage (1) 1. device is ratiometric within this specified excitation range. v s 4.74 5.1 5.46 vdc supply current i o ? 6.0 10 madc minimum pressure offset (0 to 85 c) @ v s = 5.1 volts (2) 2. offset (v off ) is defined as the output voltage at the minimum rated pressure. v off 0.241 0.306 0.371 vdc full scale output (0 to 85 c) @ v s = 5.1 volts (3) 3. full scale output (v fso ) is defined as the output voltage at the maximum or full rated pressure. v fso 4.847 4.912 4.977 vdc full scale span (0 to 85 c) @ v s = 5.1 volts (4) 4. full scale span (v fss ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. v fss 4.476 4.606 4.736 vdc accuracy (5) (0 to 85 c) 5. accuracy is the deviation in actual output from nominal output over the entire pr essure range and temperature range as a perc ent of span at 25 c due to all sources of error including the following: linearity:output deviation from a straight line relation ship with pressure over the specified pressure range. temperature hysteresis:output deviation at any temperature within the operating temperature range, after the temperature is cyc led to and from the minimum or maximum operating temperature points, with zero differential pressure applied. pressure hysteresis:output deviati on at any pressure within the specified range, wh en this pressure is cycled to and from the m inimum or maximum rated pressure, at 25 c. tcspan:output deviation over the temperature range of 0 to 85 c, relative to 25 c. tcoffset:output deviation with mini mum rated pressure applied, over the temperature range of 0 to 85 c, relative to 25 c. variation from nominal:the variation from nominal values , for offset or full scale span, as a percent of v fss , at 25 c. ??? 1.5 %v fss sensitivity v/p ? 16.2 ? mv/kpa response time (6) 6. response time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when s ubjected to a specified step change in pressure. t r ?1.0?ms warm-up time (7) 7. warm-up time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. ??20?ms offset stability (8) 8. offset stability is the product's output deviation when subjected to 1000 hours of pu lsed pressure, temperature cycling with bias test. ?? 0.25 ? %v fss
sensors 4 freescale semiconductor mpxh6300a figure 2 illustrates the absolute sensing chip in the basic super small outline chip carrier (case 1317). figure 3 illustrates a typical application circuit (output source current operation). figure 4 shows the sensor output signal relative to pressure input. typical minimum and maximum output curves are shown for operation over 0 to 85 c temperature range. the output will saturate outside of the rated pressure range. a fluorosilicone gel isolates the die surface and wire bonds from the environment, while a llowing the pressure signal to be transmitted to the silicon diaphragm. the mpxh6300a series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. media other than dry air may have adverse effects on sensor performance and long-term reliability. contact the factory for information regarding media compatibility in your application. figure 2. cross sectional diagram ssop (not to scale) figure 3. typical application circuit (output source current operation) figure 4. output versus absolute pressure fluoro silicone gel die coat wire bond lead frame sealed vacuum reference absolute element die bond stainless steel cap thermoplastic case p1 die v s pin 2 + 5.1 v gnd pin 3 v out pin 4 mpxh6300a to adc 100 nf 51 k 47 pf output (volts) pressure (reference to sealed vacuum) in kpa 20 35 50 65 80 95 110 125 140 155 170 185 200 215 230 245 260 275 290 304 4.5 0 4.0 5.0 1.0 1.5 2.0 2.5 3.0 3.5 0.5 min max typ transfer function: v out = v s *(.00318*p-.00353) error v s = 5.1 vdc temperature = 0 to 85c
sensors freescale semiconductor 5 mpxh6300a surface mounting information minimum recommended footprint for super small outline packages surface mount board layout is a critical portion of the total design. the footprint for the semiconductor package must be the correct size to ensure proper solder connection interface between the board and the package. with the correct pad geometry, the packages will self-align when subjected to a solder reflow process. it is always recommended to fabricate boards with a solder mask layer to avoid bridging and/or shorting between solder pads, especially on tight tolerances and/or tight layouts. figure 5. ssop footprint (case 1317 and 1317a) nominal transfer value: v out = v s x (0.00318 x p - 0.00353) (pressure error x temp factor x 0.00318 x v s ) v s = 5.1 0.36 vdc transfer function (mpxh6300a) temp multiplier -40 3 0 to 85 1 125 3 temperature in c 4.0 3.0 2.0 0.0 1.0 -40 -20 0 20 40 60 140 120 100 80 temperature error factor note: the temperature multiplier is a linear res ponse from 0c to -40c and from 85c to 125c. temperature error band pressure error (max) pressure error band 20 to 304 (kpa) 4.0 (kpa) mpxh6300a series pressure (in kpa) error limits for pressure break points pressure error (kpa) 3.0 2.0 1.0 -1.0 -2.0 -4.0 0.0 4.0 -3.0 20 60 100 140 180 220 260 300 0.027 typ 8x 0.69 0.053 typ 8x 1.35 inch mm 0.387 9.83 0.150 3.81 0.050 1.27 typ
sensors 6 freescale semiconductor mpxh6300a package dimensions case 1317-04 issue f super small outline package page 1 of 3
sensors freescale semiconductor 7 mpxh6300a package dimensions case 1317-04 issue f super small outline package page 2 of 3
sensors 8 freescale semiconductor mpxh6300a package dimensions case 1317-04 issue f super small outline package page 3 of 3
sensors freescale semiconductor 9 mpxh6300a package dimensions case 1317a-03 issue c super small outline package page 1 of 2
sensors 10 freescale semiconductor mpxh6300a package dimensions case 1317a-03 issue c super small outline package page 2 of 2
mpxh6300a rev. 4 01/2007 how to reach us: home page: www.freescale.com web support: http://www.freescale.com/support usa/europe or locations not listed: freescale semiconductor, inc. technical information center, el516 2100 east elliot road tempe, arizona 85284 +1-800-521-6274 or +1-480-768-2130 www.freescale.com/support europe, middle east, and africa: freescale halbleiter deutschland gmbh technical information center schatzbogen 7 81829 muenchen, germany +44 1296 380 456 (english) +46 8 52200080 (english) +49 89 92103 559 (german) +33 1 69 35 48 48 (french) www.freescale.com/support japan: freescale semiconductor japan ltd. headquarters arco tower 15f 1-8-1, shimo-meguro, meguro-ku, tokyo 153-0064 japan 0120 191014 or +81 3 5437 9125 support.japan@freescale.com asia/pacific: freescale semiconductor hong kong ltd. technical information center 2 dai king street tai po industrial estate tai po, n.t., hong kong +800 2666 8080 support.asia@freescale.com for literature requests only: freescale semiconductor lite rature distribution center p.o. box 5405 denver, colorado 80217 1-800-441-2447 or 303-675-2140 fax: 303-675-2150 ldcforfreescalesemiconductor@hibbertgroup.com information in this document is provided solely to enable system and software implementers to use freescale semiconduc tor products. there are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. freescale semiconductor reserves the right to make changes without further notice to any products herein. freescale semiconductor makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does freescale semiconductor assume any liability ar ising out of the application or use of any product or circuit, and specifically discl aims any and all liability, including without limitation consequential or incidental damages. ?typical? parameters that may be provided in freescale semiconductor data s heets and/or specifications can and do vary in different applications and actual performance may vary over time. all operating parameters, including ?typicals?, must be validated for each customer application by customer?s technical experts. freescale se miconductor does not convey any license under its patent rights nor the rights of others. freescale semiconductor products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the fa ilure of the freescale semiconductor product could create a situation where personal injury or death may occur. should buyer purchase or use freescale semiconductor products for any such unintended or unauthorized application, buyer shall indemni fy and hold freescale semiconductor and its officers, employees, subsidiaries, affili ates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that freescale semiconductor was negligent regarding the design or manufacture of the part. freescale? and the freescale logo are trademarks of freescale semiconductor, inc. all other product or service names are the property of their respective owners. ? freescale semiconductor, inc. 2007. all rights reserved.

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